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Proceedings Article

Fiberoptic microphone using a polymeric cavity

[+] Author Affiliations
Wei-Chih Wang, William Soetanto, Kebin Gu

Univ. of Washington (USA)

Proc. SPIE 7984, Health Monitoring of Structural and Biological Systems 2011, 79842B (March 31, 2011); doi:10.1117/12.880694
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From Conference Volume 7984

  • Health Monitoring of Structural and Biological Systems 2011
  • Tribikram Kundu
  • San Diego, California, USA | March 06, 2011

abstract

The fabrication and experimental investigation of a fiberoptic microphone is described. The sensing element is a silicon diaphragm with gold thin film coating that is positioned inside a silicone rubber mold at the end of a single mode optical fiber. Thus, a Fabry-Perot interferometer is formed between the inner fiber and the diaphragm. An acoustic pressure change is detected by using the developed microphone. The polymeric cavity and silicon diaphragm-based system exhibits excellent physicochemical properties with a small, simple, low cost, and lightweight design. The system is also electromagnetic interference / radio frequency interference immunity due to the use of fiberoptics.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Wei-Chih Wang ; William Soetanto and Kebin Gu
"Fiberoptic microphone using a polymeric cavity", Proc. SPIE 7984, Health Monitoring of Structural and Biological Systems 2011, 79842B (March 31, 2011); doi:10.1117/12.880694; http://dx.doi.org/10.1117/12.880694


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