Fringe spacing in white-light interferometry

Joanna Schmit; Paul Unruh; Der-Shen Wan

doi:10.1117/12.563911

2 August 2004 Fringe spacing in white-light interferometry

Joanna Schmit, Paul Unruh, Der-Shen Wan

Proceedings Volume 5531, Interferometry XII: Techniques and Analysis; (2004) https://doi.org/10.1117/12.563911
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Interference microscopes use quasi-monochromatic, broad band, and white light illumination for surface topography measurement. Fringe spacing for quasi-monochromatic illumination changes with the numerical aperture of system, and these changes have been previously examined by others. In this article we compare changes in fringe spacing for white light and broad band illumination for objectives with a numerical aperture of 0.13 and 0.55. We find that white light fringe spacing changes with tilt of the object much faster than for monochromatic illumination. We also investigate the influence of reference mirror tilt on changes in white light fringe spacing.

Citation Download Citation

Joanna Schmit, Paul Unruh, and Der-Shen Wan "Fringe spacing in white-light interferometry", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); https://doi.org/10.1117/12.563911

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