Laser damaged optics induced by chromium particle contamination

Stephanie S. P. Palmier; Isabelle Tovena; Roger Courchinoux; Michel A. Josse; Jean Luc Rullier; Bertrand Bertussi; Jean Yves Natoli; Laurent Servant; David Talaga

doi:10.1117/12.585248

21 February 2005 Laser damage to optical components induced by surface chromium particles

Stephanie S. P. Palmier, Isabelle Tovena, Roger Courchinoux, Michel A. Josse, Jean Luc Rullier, Bertrand Bertussi, Jean Yves Natoli, Laurent Servant, David Talaga

Author Affiliations +

Proceedings Volume 5647, Laser-Induced Damage in Optical Materials: 2004; (2005) https://doi.org/10.1117/12.585248
Event: Boulder Damage Symposium XXXVI, 2004, Boulder, Colorado, United States

Abstract

To obtain better understanding of particulate contamination, chromium dots (50 x 50 μm²) were deposited on a silica substrate by photolithography. The aim in using this sample is to observe the mechanism of damage initiation that can be attributed to surface contamination of micro-metric size. A Nd:YAG laser irradiated the sample at 1064 nm for different fluences and also different numbers of shots. Several methods were used to characterise the laser effects on the chromium dots and the silica substrate: "Nomarski", "atomic force" and photothermal microscope observations. The laser fluence is found to be the most important parameter for the behaviour of the chromium dots. At low fluence (<1 J/cm²), they become cracked (fractured). At medium fluence (around 1 J/cm²) chromium fusion is reached and chromium oxide appears. Finally at higher fluence (3 J/cm²), although chromium dots are blown off the substrate and small damage to silica occurs on the first shot, the subsequent shots do not lead to a dramatic increase in the damage.

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Stephanie S. P. Palmier, Isabelle Tovena, Roger Courchinoux, Michel A. Josse, Jean Luc Rullier, Bertrand Bertussi, Jean Yves Natoli, Laurent Servant, and David Talaga "Laser damage to optical components induced by surface chromium particles", Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); https://doi.org/10.1117/12.585248

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