Characterization of BaTiO3 thin films fabricated by sol gel method

Daniel Hernandez Cruz; Roger A. Lessard

doi:10.1117/12.474833

17 February 2003 Characterization of BaTiO₃ thin films fabricated by sol gel method

Daniel Hernandez Cruz, Roger A. Lessard

Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474833
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada

Abstract

Barium titanate sol was prepared using barium 2-ethyl-hexanoate and titanium isopropoxide. The sol was then spin coated on Si (100) and MgO (100) substrates and annealed at different temperatures to give polycrystalline, transparent, and crack free films. The surface morphology and structural properties of the film were studied using X-ray diffraction (XRD), Rutherford Backscattering Spectroscopy (RBS) and, Scanning Electron Microscopy (SEM).

Citation Download Citation

Daniel Hernandez Cruz and Roger A. Lessard "Characterization of BaTiO₃ thin films fabricated by sol gel method", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474833

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