Original approach to an optically active silicon-based interferometric structure for sensing applications

Christophe Gorecki; Eric Bonnotte; Hiroshi Toshioshi; Fred Benoit; Hideki Kawakatsu; Hiroyuki Fujita

doi:10.1117/12.281184

17 September 1997 Original approach to an optically active silicon-based interferometric structure for sensing applications

Christophe Gorecki, Eric Bonnotte, Hiroshi Toshioshi, Fred Benoit, Hideki Kawakatsu, Hiroyuki Fujita

Author Affiliations +

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281184
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

As a novelty application of Si-based integrated optics, the results of realization of a compact Mach-Zehnder interferometer will be presented. The deposition of a ZnO thin-film transducer on the reference arm of the interferometer will allow to transform this optically passive device in a device under an active sinusoidal phase modulation.

Citation Download Citation

Christophe Gorecki, Eric Bonnotte, Hiroshi Toshioshi, Fred Benoit, Hideki Kawakatsu, and Hiroyuki Fujita "Original approach to an optically active silicon-based interferometric structure for sensing applications", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281184

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