Strategies toward the development of integrated chemical sensors fabricated from light-emitting porous silicon

Jeffrey L. Coffer; Libing Zhang; John St. John

doi:10.1117/12.284565

2 September 1997 Strategies toward the development of integrated chemical sensors fabricated from light-emitting porous silicon

Jeffrey L. Coffer, Libing Zhang, John St. John

Author Affiliations +

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284565
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

In this work several different approaches designed to produce an opto-electronic chemical sensor based on light-emitting porous Si are described, all of which entail modification of the as-formed porous Si surface in order to alter device characteristics. The issue of selectivity and sensitivity of a given porous Si sensor can be modified by coating the porous Si surface with 'basket'-shaped molecules known as calixarenes; the ability of such a structure to detect copper ions and organonitrogen compounds is reported. Surface modification of porous Si through etching and deposition of conducting polymers in order to alter Si light emission color and intensity is also discussed. The fabrication of porous Si- based waveguides on Si and the impact of surface modification with erbium ions are also described.

Citation Download Citation

Jeffrey L. Coffer, Libing Zhang, and John St. John "Strategies toward the development of integrated chemical sensors fabricated from light-emitting porous silicon", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284565

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