Optical design and implementation of a multi-functional miniature interferometer

Chih-Kung Lee; Giin-Yuan Wu; Wen-Jong Wu; Chin-Fa Lee; Chan-Ching Lin; Yen-Jen Lin

doi:10.1117/12.322053

21 September 1998 Optical design and implementation of a multi-functional miniature interferometer

Chih-Kung Lee, Giin-Yuan Wu, Wen-Jong Wu, Chin-Fa Lee, Chan-Ching Lin, Yen-Jen Lin

Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.322053
Event: International Optical Design Conference, 1998, Kona, HI, United States

Abstract

The design of a newly developed interferometer is described. This interferometer possesses built-in measuring modes such as: (1) absolute vibration, (2) differential vibration, and (3) distance measuring. The circular polarization interferometer configuration, which gives it its compact size and which has a built-in microscopic imaging system, is detailed. In addition, the mechanical layout of the system which guarantees that all alignment functions are orthogonal to each other is also discussed. Various experimental tests were performed to demonstrate the nanometer resolution and megahertz bandwidth capabilities of this new developed interferometer.

Citation Download Citation

Chih-Kung Lee, Giin-Yuan Wu, Wen-Jong Wu, Chin-Fa Lee, Chan-Ching Lin, and Yen-Jen Lin "Optical design and implementation of a multi-functional miniature interferometer", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.322053

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