Dr. Benoit Francois Claude Ramadout
at Globalfoundries
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 March 2017 Paper
Tuhin Guha Neogi, Navneet Jain, Piyush Verma, David Permana, Andrey Lutich, Francois Weishbuch, Deepal Wehella-Gamage, Benoit Francois Claude Ramadout, Gowtham Vangara, Juhan Kim, Thomas Herrmann, Kai Sun, Katherina Babich, David Pritchard, Mahbub Rashed
Proceedings Volume 10148, 101480Z (2017) https://doi.org/10.1117/12.2258668
KEYWORDS: Monte Carlo methods, Diffusion, Statistical analysis, Lithography, Manufacturing, Diffractive optical elements, Optical lithography, Design for manufacturability, Silicon, Shape analysis

Proceedings Article | 28 March 2017 Paper
B. Ramadout, D. Wehella-Gamage, T. Staiger, H.-P. Moll, T.-Guha Neogi
Proceedings Volume 10148, 1014812 (2017) https://doi.org/10.1117/12.2258453
KEYWORDS: Diffractive optical elements, Electrical breakdown, Metals, Transistors, Diffusion, Silicon, Resistance, Semiconductors, Manufacturing, Design for manufacturability, Failure analysis

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