Mr. Byung-Kap Kim Profile

Byung-Kap Kim

at Samsung Electronics Co Ltd

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Publications (2)

Proceedings Article | 22 August 2001 Paper

Control of resist flow process for sub-0.15-um small contact hole by latent image

Byung-Kap Kim, Suk-Joo Lee, Dae-Yup Lee, Jeong-Woo Lee, Jeong-Lim Nam

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436755

KEYWORDS: Image processing, Photomasks, Chromium, Radiofrequency ablation, Photoresist processing, Critical dimension metrology, Phase shifts, Glasses, Microfluidics, Control systems

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Proceedings Article | 25 August 2000 Paper

Improvement of structural stability and IR-detecting characteristics of microbolometer

HoKwan Kang, W. Ha, C. Park, Byung-Kap Kim, Sung Moon, ToHoon Kim

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396452

KEYWORDS: Infrared detectors, Vanadium, Microbolometers, Bolometers, Bridges, Oxides, Infrared bolometers, Surface micromachining, Molecular bridges, Distortion

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