Daijoon Hyun
at KAIST
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2018 Paper
Proceedings Volume 10588, 105880R (2018) https://doi.org/10.1117/12.2297496
KEYWORDS: Metals, Photomasks, Resistance, Copper, Double patterning technology, Clocks, Lithography, Signal processing, Etching, Chemical mechanical planarization

Proceedings Article | 28 March 2017 Presentation + Paper
Proceedings Volume 10148, 101480O (2017) https://doi.org/10.1117/12.2258034
KEYWORDS: Metals, Capacitance, Dielectrics, Copper, Atomic layer deposition, Chemical vapor deposition, Etching, Electrical engineering, Electronics

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 97810F (2016) https://doi.org/10.1117/12.2219150
KEYWORDS: Capacitance, Double patterning technology, Manufacturing, Metals, Photomasks, Monte Carlo methods, Design for manufacturability, Electrical engineering, Electronics, Dielectrics

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