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Dmitry Yu. Knyazkov
at NANOTECH SWHL Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 17 April 2012 Paper
Phase-shift at subwavelength holographic lithography (SWHL)
Mikhail Borisov, Dmitriy Chelyubeev, Vitalij Chernik, Alexander Gavrikov, Dmitriy Yu. Knyazkov, Petr Mikheev, Vadim Rakhovsky, Alexey Shamaev
Proceedings Volume 8352, 83520P (2012) https://doi.org/10.1117/12.918016
KEYWORDS: Phase shifts, Photomasks, Holograms, Holography, 3D image reconstruction, Lithography, Manufacturing, Transparency, Photoresist materials, Tolerancing
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