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Dominique Sanchez
at STMicroelectronics
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Publications (1)
Proceedings Article | 19 March 2015 Paper
Accelerated technology development by the use of critical point imaging SEM
Dominique Sanchez, Benôit Hinschberger, Loemba Bouckou, Olivier Moreau, Paolo Parisi
Proceedings Volume 9424, 94242H (2015) https://doi.org/10.1117/12.2073889
KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Microelectronics, Process control, Image processing, Semiconductor manufacturing, Imaging systems, Visualization, Defect inspection
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