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Frank Tsai
MTS at Cypress Semiconductor Corp
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Author
Publications (5)
Proceedings Article | 26 March 2008 Paper
A modified bilayer resist approach for 45 nm flash lithography
Brian Osborn, Gloria Quinto, Cristina Cheung, Fei Wang, Calvin Gabriel, Fred Cheung, Frank Tsai, Anna Minvielle
Proceedings Volume 6923, 69230Y (2008) https://doi.org/10.1117/12.772760
KEYWORDS: Etching, Silicon, Lithography, Photoresist materials, Photomasks, Reflectivity, Optical lithography, Scanning electron microscopy, Line edge roughness, Photoresist developing
Proceedings Article | 7 March 2008 Paper
32nm overlay improvement capabilities
Proceedings Volume 6924, 69244C (2008) https://doi.org/10.1117/12.773014
KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Metrology, Double patterning technology, Performance modeling, Data modeling, Lithography, Optical lithography, Statistical modeling
Proceedings Article | 19 June 1998 Paper
Integrated monitoring system for optical CATV networks
Ching Sheu Wang, Chien-Chung Lee, Frank Tsai, T. Liaw, W. Fang, L. Wei, S. Huang, Y. Tu
Proceedings Volume 3420, (1998) https://doi.org/10.1117/12.312844
KEYWORDS: Transmitters, Optical networks, Receivers, Networks, System integration, Integrated optics, Active optics, Network architectures, Phase modulation, Fermium
Proceedings Article | 19 June 1998 Paper
In-service fault locating and supervisory CATV optical distribution network using WDM-based OTDR and optical switches
Ching Sheu Wang, Frank Tsai, Y. Tu, Chien-Chung Lee, Chi-Hsiung Chang, Yung Kung Chen
Proceedings Volume 3420, (1998) https://doi.org/10.1117/12.312848
KEYWORDS: Optical switching, Wavelength division multiplexing, Single mode fibers, Networks, Optical networks, Composites, Diagnostics, Video, Reflectometry, Surveillance systems
Proceedings Article | 19 June 1998 Paper
Single-longitudinal-mode fiber laser using passive multiple-ring-cavity technique
Chien-Chung Lee, Yung Kung Chen, Shien-Kuei Liaw, Frank Tsai, Ching Sheu Wang, Y. Tu
Proceedings Volume 3420, (1998) https://doi.org/10.1117/12.312858
KEYWORDS: Fiber lasers, Transmitters, Fiber Bragg gratings, Spatial light modulators, Video, Optical filters, Electronic filtering, Resonators, Modulators, Optical amplifiers
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