Mr. Hideki Matsui Profile

Hideki Matsui

Manager at NuFlare Technology.inc

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Publications (2)

Proceedings Article | 25 October 2016 Paper

Electron beam mask writer EBM-9500 for logic 7nm node generation

Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi, Haruyuki Nomura, Noriaki Nakayamada, Mizuna Suganuma, Yasuo Kato, Jun Yashima, Victor Katsap, Kenichi Saito, Ryoei Kobayashi, Nobuo Miyamoto, Munehiro Ogasawara

Proceedings Volume 9985, 998508 (2016) https://doi.org/10.1117/12.2242987

KEYWORDS: Photomasks, Lithography, Electron beams, Logic, Electron beam melting, Line edge roughness, Electron beam lithography, Extreme ultraviolet, Optical lithography, LCDs

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Proceedings Article | 30 September 2009 Paper

Electron beam mask writer EBM-7000 for hp 32nm generation

Takashi Kamikubo, Kenji Ohtoshi, Noriaki Nakayamada, Rieko Nishimura, Hitoshi Sunaoshi, Kiminobu Akeno, Soichiro Mitsui, Yuichi Tachikawa, Hideo Inoue, Susumu Oogi, Hitoshi Higurashi, Akinori Mine, Takiji Ishimura, Seiichi Tsuchiya, Yoshitada Gomi, Hideki Matsui, Shuichi Tamamushi

Proceedings Volume 7488, 74881E (2009) https://doi.org/10.1117/12.833462

KEYWORDS: Photomasks, Data processing, Electron beams, Distributed computing, Objectives, Double patterning technology, Magnetism, Optical lithography, Overlay metrology, Lithography

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