Mr. In-Yong Kang Profile

In-Yong Kang

PhD Candidate at Hanyang Univ

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Publications (2)

Proceedings Article | 23 March 2006 Paper

Numerical modeling of absorber characteristics for EUVL

In-Yong Kang, Jinho Ahn, Hye-Keun Oh, Yong-Chae Chung

Proceedings Volume 6151, 615121 (2006) https://doi.org/10.1117/12.655852

KEYWORDS: Tantalum, Chromium, Reflectivity, Extreme ultraviolet lithography, Photomasks, Image processing, Geometrical optics, Systems modeling, Numerical modeling, Lithography

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Proceedings Article | 23 March 2006 Paper

Combined absorber stack for optimization of the EUVL mask

Seung Lee, Tae Kim, Chung Kim, In-Yong Kang, Yong-Chae Chung, Jinho Ahn

Proceedings Volume 6151, 61511Y (2006) https://doi.org/10.1117/12.656928

KEYWORDS: Reflectivity, Deep ultraviolet, Extreme ultraviolet, Aluminum, Ruthenium, Extreme ultraviolet lithography, Photomasks, Etching, Optical simulations, Inspection

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