Jing Qiao
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540K (2024) https://doi.org/10.1117/12.3010034
KEYWORDS: Optical proximity correction, Calibration, Contour modeling, Scanning electron microscopy, Data modeling, Data acquisition, Contour extraction, Image quality, Critical dimension metrology, Process modeling

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top