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Kanstantsin Shchehlik
at Mentor, a Siemens Business
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Publications (1)
Proceedings Article | 4 April 2019 Paper
Using machine learning in the physical modeling of lithographic processes
Kostas Adam, Shashidhara Ganjugunte, Clement Moyroud, Kostya Shchehlik, Michael Lam, Andrew Burbine, Germain Fenger, Yuri Granik
Proceedings Volume 10962, 109620F (2019) https://doi.org/10.1117/12.2519848
KEYWORDS: Neural networks, Machine learning, Systems modeling, Optical proximity correction, Data modeling, Process modeling, Calibration, Lithography, Cadmium, Coastal modeling
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