Dr. Kazufumi Shiozawa Profile

Dr. Kazufumi Shiozawa

at Toshiba Memory Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 March 2019 Paper

Kazufumi Shiozawa, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, Toshiya Kotani

Proceedings Volume 10962, 109620T (2019) https://doi.org/10.1117/12.2515665

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Image classification, Photomasks, System on a chip, Convolution, Wafer inspection

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Keywords/Phrases