Dr. Linda C. Towidjaja
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 61521X (2006) https://doi.org/10.1117/12.656515
KEYWORDS: Scatterometry, Dielectrics, Atomic force microscopy, Etching, Critical dimension metrology, Metals, Semiconducting wafers, Back end of line, Optical properties, Metrology

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