Mr. Masayuki Hayakawa Profile

Masayuki Hayakawa

at OMRON Corp

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 31 August 2005 Paper

New configuration of channeled spectropolarimeter for snapshot polarimetric measurement of materials

Hiroshi Okabe, Kenichi Matoba, Masayuki Hayakawa, Atsushi Taniguchi, Kazuhiko Oka, Hitoshi Naito, Nobuo Nakatsuka

Proceedings Volume 5878, 58780H (2005) https://doi.org/10.1117/12.616298

KEYWORDS: Wave plates, Spectroscopy, Head, Statistical analysis, Calibration, Polarimetry, Light sources, Silicon, Polarizers, Prototyping

Read Abstract +

A novel configuration for the channeled spectroscopic ellipsometer (CSE) is presented. The channeled spectroscopic ellipsometry is a snapshot method for the spectrally-resolved polarization analysis. In this method, multiple-order retarders are utilized to generate a channeled spectrum carrying information about the wavelength-dependent multiple parameters of polarization of light. This method has a feature that it requires no mechanical or active components for polarization-control, such as a rotating compensator and an electro-optic modulator. In spite of these advantages, however, the previously proposed configuration of the CSE has a drawback that it is susceptible to the ray-direction variation introduced by the angular fluctuation of the ellipsometric sample. To overcome this drawback, an alternative configuration for the CSE has been developed. In this configuration, the multiple-order retarders are inserted between a light source and a sample, so that the measured results are not affected by the fluctuations due to the reflection from the sample. A compact sensing head whose size is 160mm(W)×53mm(H)×30mm(D) was realized using the new configuration, and applied for the snapshot measurement of the SiO₂ films deposited on a Si substrate, with the acquisition time of 20 ms. The measured thicknesses of the SiO₂ films are almost agree with the results from the rotating-compensator ellipsometer. The configuration that has the multiple-order retarders in the polarization-generating section can apply to other spectroscopic polarimeters to remove the influence of the ray-direction fluctuations due to the reflection or transmission from the sample.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years