Dr. Meng Zhang Profile

Dr. Meng Zhang

at Information Science Academy of CETC

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Author

Publications (3)

Proceedings Article | 18 March 2024 Paper

Fabrication of 12×14 MEMS-based Fabry-Pérot tunable filter array

Song Liu, Jun Cao, Weiping Wang, Lintong Yan, Meng Zhang, Jing Cao

Proceedings Volume 13104, 131046Z (2024) https://doi.org/10.1117/12.3023909

KEYWORDS: Tunable filters, Microelectromechanical systems, Mirrors, Fabrication, Silicon, Multispectral imaging, Optical filters, Mirror surfaces, Transmittance, Infrared radiation

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Proceedings Article | 31 May 2023 Paper

Effect of the cone angle of incident light beam on the performance characterization of MEMS F-P filter

Meng Zhang, Cheng ao Yang, Weiping Wang, Jing Cao, Song Liu, Xiaoyan Hu

Proceedings Volume 12711, 127110L (2023) https://doi.org/10.1117/12.2684221

KEYWORDS: Mirrors, Tunable filters, Transmittance, Optical filters, Microelectromechanical systems

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Proceedings Article | 1 November 2021 Paper

Research on a sensitive structure with high sensitivity for MOEMS application

Meng Zhang, Shaoyu Zhao, Xiaoyan Hu

Proceedings Volume 12057, 120571X (2021) https://doi.org/10.1117/12.2605698

KEYWORDS: Microelectromechanical systems, Transmittance, Mirrors, Optical filters, Refractive index, Optical simulations

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