Prof. Mikio Horie Profile

Prof. Mikio Horie

Professor at Tokyo Institute of Technology

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 10 October 2007 Paper

Development of two arm micromanipulator for handling and assembling of minute objects in fixed view by use of pantograph mechanisms

Mikio Horie, Daiki Kamiya, Masahiro Kouno, Naoto Mochizuki, Yoshimichi Yoda, Akiharu Higaki, Makoto Nakamura

Proceedings Volume 6715, 67150J (2007) https://doi.org/10.1117/12.754424

KEYWORDS: Actuators, Electronic components, Optical components, Opto mechatronics, Microscopes, CCD cameras, Astatine, Analog electronics, Servomechanisms, Control systems

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Proceedings Article | 25 October 2004 Paper

Mechano-micro/nano systems

Mikio Horie

Proceedings Volume 5604, (2004) https://doi.org/10.1117/12.582751

KEYWORDS: Mirrors, Actuators, Manufacturing, Electrodes, Micromirrors, Optical switching, Nanotechnology, Silicon, Chemical species, Sensors

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Proceedings Article | 16 August 2004 Paper

Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch

Daiki Kamiya, Saeed Bagheri, Mikio Horie

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545993

KEYWORDS: Mirrors, Mathematical modeling, Optical switching, Electrodes, Switches, Neodymium, Actuators, Switching, Microactuators, Capacitors

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Proceedings Article | 18 October 2002 Paper

Design and manufacturing of actuating beams with mirror and electrodes with mirror support pyramid on substrate for optical switch

Mikio Horie, Taketo Gozu, Daiki Kamiya

Proceedings Volume 4902, (2002) https://doi.org/10.1117/12.467717

KEYWORDS: Mirrors, Electrodes, Actuators, Silicon, Manufacturing, Optical switching, Optics manufacturing, Etching, Beam shaping, Reactive ion etching

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