Dr. Parul Dhagat
Graduate Research Assistant at GlobalFoundries
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 7 February 2017
Kafai Lai, Chi-Chun Liu, Hsinyu Tsai, Yongan Xu, Cheng Chi, Ananthan Raghunathan, Parul Dhagat, Lin Hu, Oseo Park, Sunggon Jung, Wooyong Cho, Jaime Morillo, Jed Pitera, Kristin Schmidt, Mike Guillorn, Markus Brink, Daniel Sanders, Nelson Felix, Todd Bailey, Matthew Colburn
JM3, Vol. 16, Issue 01, 013502, (February 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.1.013502
KEYWORDS: Directed self assembly, Resolution enhancement technologies, Lithography, Metals, Optical lithography, Photomasks, 3D modeling, Computational lithography, Optical proximity correction

Proceedings Article | 22 March 2016 Paper
B. Meliorisz, T. Mülders, H.-J. Stock, S. Marokkey, W. Demmerle, K. Lai, A. Raghunathan, P. Dhagat
Proceedings Volume 9777, 97770Z (2016) https://doi.org/10.1117/12.2219158
KEYWORDS: Calibration, Data modeling, 3D modeling, Computational lithography, Lithography, Optimization (mathematics), Directed self assembly, Optical lithography, Metals, Photomasks, Scanning electron microscopy, Statistical analysis, Picosecond phenomena, Interfaces

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