Dr. Renaud Jourdain Profile

Dr. Renaud Jourdain

IBF researcher at Cranfield Univ

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Proceedings Article | 13 September 2012 Paper

Fast figuring of large optics by reactive atom plasma

Marco Castelli, Renaud Jourdain, Paul Morantz, Paul Shore

Proceedings Volume 8450, 845034 (2012) https://doi.org/10.1117/12.925698

KEYWORDS: Plasma, Mirrors, Chemical species, Polishing, Surface finishing, Atmospheric plasma, James Webb Space Telescope, Astronomy, Optical fabrication, Wet etching

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The next generation of ground-based astronomical observatories will require fabrication and maintenance of extremely large segmented mirrors tens of meters in diameter. At present, the large production of segments required by projects like E-ELT and TMT poses time frames and costs feasibility questions. This is principally due to a bottleneck stage in the optical fabrication chain: the final figuring step. State-of-the-art figure correction techniques, so far, have failed to meet the needs of the astronomical community for mass production of large, ultra-precise optical surfaces. In this context, Reactive Atom Plasma (RAP) is proposed as a candidate figuring process that combines nanometer level accuracy with high material removal rates. RAP is a form of plasma enhanced chemical etching at atmospheric pressure based on Inductively Coupled Plasma technology. The rapid figuring capability of the RAP process has already been proven on medium sized optical surfaces made of silicon based materials. In this paper, the figure correction of a 3 meters radius of curvature, 400 mm diameter spherical ULE^® mirror is presented. This work demonstrates the large scale figuring capability of the Reactive Atom Plasma process. The figuring is carried out by applying an in-house developed procedure that promotes rapid convergence. A 2.3 μm p-v initial figure error is removed within three iterations, for a total processing time of 2.5 hours. The same surface is then re-polished and the residual error corrected again down to λ/20 nm rms. These results highlight the possibility of figuring a metre-class mirror in about ten hours.

Proceedings Article | 5 May 2012 Paper

Plasma surface figuring of large optical components

R. Jourdain, M. Castelli, P. Morantz, P. Shore

Proceedings Volume 8430, 843011 (2012) https://doi.org/10.1117/12.924798

KEYWORDS: Plasma, Optical components, Surface finishing, Polishing, Optics manufacturing, Chemical species, Silicon, Spherical lenses, Atmospheric optics, Optical fabrication

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Fast figuring of large optical components is well known as a highly challenging manufacturing issue. Different manufacturing technologies including: magnetorheological finishing, loose abrasive polishing, ion beam figuring are presently employed. Yet, these technologies are slow and lead to expensive optics. This explains why plasma-based processes operating at atmospheric pressure have been researched as a cost effective means for figure correction of metre scale optical surfaces. In this paper, fast figure correction of a large optical surface is reported using the Reactive Atom Plasma (RAP) process. Achievements are shown following the scaling-up of the RAP figuring process to a 400 mm diameter area of a substrate made of Corning ULE®. The pre-processing spherical surface is characterized by a 3 metres radius of curvature, 2.3 μm PVr (373nm RMS), and 1.2 nm S_q nanometre roughness. The nanometre scale correction figuring system used for this research work is named the HELIOS 1200, and it is equipped with a unique plasma torch which is driven by a dedicated tool path algorithm. Topography map measurements were carried out using a vertical work station instrumented by a Zygo DynaFiz interferometer. Figuring results, together with the processing times, convergence levels and number of iterations, are reported. The results illustrate the significant potential and advantage of plasma processing for figuring correction of large silicon based optical components.

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