Dr. Robert Fox Profile

Dr. Robert Fox

at GLOBALFOUNDRIES Inc

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Author

Publications (1)

Proceedings Article | 28 March 2017 Presentation + Paper

High-throughput electrical characterization for robust overlay lithography control

Devender Devender, Xumin Shen, Mark Duggan, Sunil Singh, Jonathan Rullan, Jae Choo, Sohan Mehta, Teck Jung Tang, Sean Reidy, Jonathan Holt, Hyung Woo Kim, Robert Fox, D. K. Sohn

Proceedings Volume 10145, 101450K (2017) https://doi.org/10.1117/12.2260707

KEYWORDS: Overlay metrology, Back end of line, Process control, Lithography, Semiconductors, Semiconductor manufacturing, Resistance, Reliability, Photomasks, Image processing, Metals, Optical lithography

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