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Shweta Bhola
at IPTRADE Inc
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Publications (1)
Proceedings Article | 24 March 2009 Paper
Sub-nanometer broadband measurement of elastic displacements in optical metrology frames and other critical elements
Grace Kessenich, Shweta Bhola, Baruch Pletner, Wesley Horth, Anette Hosoi
Proceedings Volume 7272, 727221 (2009) https://doi.org/10.1117/12.815380
KEYWORDS: Sensors, Metrology, Optical metrology, Algorithm development, Optical components, Reconstruction algorithms, Time metrology, Finite element methods, Optical alignment, Solids
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