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Sunao Aoki
at Sony Corp
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Publications (1)
Proceedings Article | 31 July 2009 Paper
Development of deformable mirror for spherical aberration compensation
Sunao Aoki, Masahiro Yamada, Tamotsu Yamagami
Proceedings Volume 7505, 750513 (2009) https://doi.org/10.1117/12.838530
KEYWORDS: Deformable mirrors, Reflectivity, Mirrors, Silicon, Monochromatic aberrations, Microelectromechanical systems, Actuators, Semiconducting wafers, Silicon films, Objectives
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