Dr. Tao Chen Profile

Dr. Tao Chen

at Wyant College of Optical Sciences

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 11 July 2007 Paper

Fabrication and testing of a GaP SIL with NA=2.64

Jun Zhang, Matt Lang, Tom Milster, Tao Chen, Eric Aspnes, Bernard Bell

Proceedings Volume 6620, 66201Z (2007) https://doi.org/10.1117/12.738940

KEYWORDS: Polarization, Surface finishing, Glasses, Epoxies, Polishing, Microscopes, Solids, Gallium, Index matching antireflective coatings, Imaging systems

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Proceedings Article | 20 October 2006 Paper

Experimental investigation of photomask with near-field polarization imaging

Tao Chen, Tom Milster, Seung-Hune Yang

Proceedings Volume 6349, 634953 (2006) https://doi.org/10.1117/12.686420

KEYWORDS: Polarization, Near field, Photomasks, Image resolution, Atomic force microscopy, Objectives, Imaging systems, Solids, Phase shifts, Spatial resolution

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SPIE Journal Paper | 1 October 2006

Near-field solid immersion lens microscope with advanced compact mechanical design

Tao Chen, Thomas Milster, Sang-Ki Park, Brendan McCarthy, Dror Sarid, C. Poweleit, Jose Menendez

OE, Vol. 45, Issue 10, 103002, (October 2006) https://doi.org/10.1117/12.10.1117/1.2361276

KEYWORDS: Microscopes, Near field, Objectives, Atomic force microscopy, Solids, Digital video discs, Mechanical engineering, Optical engineering, Near field optics, Control systems

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Proceedings Article | 22 June 2006 Paper

Near-field induced polarization imaging for optical data storage metrology

Tao Chen, Tom Milster

Proceedings Volume 6282, 62820D (2006) https://doi.org/10.1117/12.685172

KEYWORDS: Polarization, Near field, Image resolution, Optical storage, Calibration, Imaging systems, Objectives, Optical transfer functions, Solids, Reflection

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Proceedings Article | 5 November 2005 Paper

Semiconductor pattern analysis with induced polarization

Tao Chen, Tom Milster, Seung Hune Yang

Proceedings Volume 5992, 59921L (2005) https://doi.org/10.1117/12.632240

KEYWORDS: Polarization, Near field, Image resolution, Microscopes, Semiconductors, Objectives, Solids, Microscopy, Refractive index, Reflection

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Proceedings Article | 12 May 2005 Paper

Potential of solid immersion lithography using I-line and KrF light source

Dongseok Nam, Tom Milster, Tao Chen

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600082

KEYWORDS: Light sources, Near field, Refractive index, Photoresist materials, Solids, Lithography, Polarization, Near field optics, Optical lithography, Immersion lithography

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Proceedings Article | 12 May 2005 Paper

Experimental investigation of solid immersion lens lithography

Tao Chen, Tom Milster, Dongseok Nam, Seung Yang

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600065

KEYWORDS: Lithography, Objectives, Near field optics, Solids, Microscopes, Collimation, Photomasks, Semiconductor lasers, Semiconducting wafers, Polarization

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Proceedings Article | 6 December 2004 Paper

Maskless lithography with the solid immersion lens nanoprobes

Tom Milster, Tao Chen, Dongseok Nam, Tuviah Schlesinger

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569328

KEYWORDS: Transducers, Lithography, Semiconducting wafers, Dielectrics, Photoresist materials, Maskless lithography, Photomasks, Near field optics, Near field, Solids

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Proceedings Article | 9 September 2004 Paper

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen, David Felix, Sang-Ki Park, Paul Hauser, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez, Tom Milster

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.557055

KEYWORDS: Microscopes, Objectives, Near field, Atomic force microscopy, Solids, Digital video discs, Control systems, Mechanical engineering, Near field optics, Tolerancing

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Showing 5 of 9 publications

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