Prof. Tsu-Jae King Liu
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10958, 109581F (2019) https://doi.org/10.1117/12.2515154
KEYWORDS: Optical lithography, Etching, Argon, Monte Carlo methods, Ion implantation, Photoresist materials, Photomasks, Silicon, Semiconducting wafers, Wet etching

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