Dr. Yi-Ming Liu Profile

Dr. Yi-Ming Liu

at Chung Cheng Institute of Technology

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Author

Publications (3)

Proceedings Article | 12 April 2005 Paper

Surface morphology and recrystallization behavior of amorphous Si after ArF laser irradiation

Ta-Tung Chen, Chih-Yu Chang, Choung-Lii Chao, Kung-Jen Ma, Yi-Ming Liu, Ying-Tung Chen, Chun-Wei Lin

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.591921

KEYWORDS: Amorphous silicon, Silicon, Excimer lasers, Laser processing, Semiconductor lasers, Laser irradiation, Thin films, Silicon films, Annealing, Solids

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Proceedings Article | 12 April 2005 Paper

Investigation of laser ablation of CVD diamond film

Choung-Lii Chao, W. C. Chou, Kung-Jen Ma, Ta-Tung Chen, Y. M. Liu, Y. S. Kuo, Ying-Tung Chen

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.592004

KEYWORDS: Diamond, Laser ablation, Chemical vapor deposition, Scanning electron microscopy, Excimer lasers, Carbon, Photomicroscopy, Polishing, Surface roughness, Surface finishing

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Proceedings Article | 22 January 2005 Paper

Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser

Yunn-shiuan Liao, Ying-Tung Chen, Choung-Lii Chao, Yih-Ming Liu

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.592034

KEYWORDS: Glasses, Excimer lasers, Laser ablation, Laser processing, Micromachining, Ultraviolet radiation, Zerodur, Pulsed laser operation, Polymers, Laser scattering

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