Mr. Hao Yun Yu Profile

Hao Yun Yu

at National Taiwan Univ

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts

Yi-Yeh Yang, Hsuan-Ping Lee, Chun-Hung Liu, Hao-Yun Yu, Kuen-Yu Tsai, Jia-Han Li

Proceedings Volume 9050, 905032 (2014) https://doi.org/10.1117/12.2048683

KEYWORDS: Calibration, Lithography, Scatterometry, Semiconducting wafers, Light scattering, 3D modeling, Diffraction, Scattering, Photoresist processing, Process control

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Proceedings Article | 28 March 2014 Paper

Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly

Hao Yun Yu, Chun-Hung Liu, Yu Tian Shen, Hsuan-Ping Lee, Kuen Yu Tsai

Proceedings Volume 9049, 90492C (2014) https://doi.org/10.1117/12.2046615

KEYWORDS: Line edge roughness, Critical dimension metrology, Electron beam lithography, Lithography, Optical lithography, Transistors, Electrons, Semiconducting wafers, Tolerancing, Directed self assembly

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