Mr. Zhenyu Chen Profile

Zhenyu Chen

at Harbin Institute of Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 6 March 2015 Paper

Passive protective strategy for ultra-precision dual-stage

Yang Liu, Zhenyu Chen, Zhenxian Fu

Proceedings Volume 9446, 94464X (2015) https://doi.org/10.1117/12.2182389

KEYWORDS: Safety, Semiconducting wafers, Lithography, Control systems, Surface plasmons, 3D modeling, Instrumentation engineering, Amplifiers, Protactinium, Mechanical engineering

Read Abstract +

Proceedings Article | 6 March 2015 Paper

Cogging force rejection method of linear motor based on internal model principle

Yang Liu, Zhenyu Chen, Tianbo Yang

Proceedings Volume 9446, 94464Y (2015) https://doi.org/10.1117/12.2182395

KEYWORDS: Data modeling, Magnetism, Performance modeling, Structural design, Lithography, Actuators, Iron, Instrumentation engineering, Detection and tracking algorithms, Digital filtering

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years