Dr. Zhijun Zhang
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 January 2008 Paper
Zijun Zhang, Xudi Wang, Ying Liu, Yuxian Guo, Yilin Hong, Xiangdong Xu, Shaojun Fu, Pengshou Xu, Jie Wang, Jianwang Cai
Proceedings Volume 6831, 68311B (2008) https://doi.org/10.1117/12.757524
KEYWORDS: Magnetism, Iron, Lithography, Nanostructures, Nanolithography, Oxygen, Cobalt, Tantalum, Gold, Etching

Proceedings Article | 21 November 2007 Paper
Zijun Zhang, Yuxian Guo, Youmei Chen, Yin Liu, Xiangdong Xu, Shaojun Fu, Jie Wang, Pengshou Xu
Proceedings Volume 6724, 67241J (2007) https://doi.org/10.1117/12.782895
KEYWORDS: Magnetism, Lithography, Iron, Etching, Cobalt, Ion beams, Photoresist materials, X-ray magnetic circular dichroism, Tantalum, Sputter deposition

Proceedings Article | 21 November 2007 Paper
Xudi Wang, Zijun Zhang, Liangjin Ge, Yanlin Liao, Shaojun Fu
Proceedings Volume 6827, 68271T (2007) https://doi.org/10.1117/12.757290
KEYWORDS: Ultraviolet radiation, Polymethylmethacrylate, Semiconducting wafers, Transmittance, Scanning electron microscopy, Glasses, Wafer bonding, Nanolithography, Polymers, Silicon

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