Ms. Zhu Ruan Profile

Zhu Ruan

at Univ of Science and Technology of China

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 29 May 2013 Paper

Monte Carlo simulation of realistic beam-sample interaction in SEM: application to evaluation of sharpness measurement methods

Z. Ruan, S. Mao, P. Zhang, H. Li, Z. Ding

Proceedings Volume 8729, 87290J (2013) https://doi.org/10.1117/12.2015357

KEYWORDS: Scanning electron microscopy, Monte Carlo methods, Fourier transforms, Monochromatic aberrations, Statistical modeling, Instrument modeling, Particles, Scattering, Device simulation, Image processing

Read Abstract +

Monte Carlo simulated SEM images for realistic instrumental conditions are used to evaluate measurement methods for SEM image sharpness. The Monte Carlo simulation of the SEM image is based on a well-developed physical model of electron-solid interaction, which employs Mott’s cross section for elastic electron scattering and dielectric functional approach to electron inelastic scattering with cascade secondary electron production included, a finite element mesh modeling of complex sample topography and a modeling of SEM instrumental conditions (i.e. focus, astigmatism, drift and vibration). A series of simulated SEM images of a realistic sample, gold particles on a carbon substrate, for different instrumental parameters are generated to represent practical images where all instrumental conditions are precisely known and controlled. An estimation of three measurement methods of SEM image sharpness, i.e. FT, CG and DR methods, has then been performed with these simulated images. The responses of image sharpness measurement methods to various instrumental conditions are studied. The calculation shows that all the three methods present similar and reasonable response to focus parameter; their dependences of the measured sharpness on astigmatism coefficient are complicated and CG method presents reasonable sharpness value. For drift and vibration, the situation is more complex because CG/DR methods can be less or more sensitive to vibration coefficient than FT method. Because of the different response behaviors of the three sharpness measurement methods to experimental parameters, we propose to use a mean, simple average or weighted average, of three sharpness values as a proper measure of sharpness.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years