Measurement of small optics by use of a multi-wavelength interferometrical approach

Marc Wendel

doi:10.1117/12.2542914

30 December 2019 Measurement of small optics by use of a multi-wavelength interferometrical approach

Marc Wendel

Proceedings Volume 11385, Optics and Measurement International Conference 2019; 113850M (2019) https://doi.org/10.1117/12.2542914
Event: Optics and Measurement 2019 International Conference, 2019, Liberec, Czech Republic

Abstract

A new approach for measurement of small and thin lenses is introduced, based on the combination of long and short coherence interferometrical point probe systems in one measurement device. The basic working principle, as well as first results, are presented, and the benefits of this approach are highlighted.

Citation Download Citation

Marc Wendel "Measurement of small optics by use of a multi-wavelength interferometrical approach", Proc. SPIE 11385, Optics and Measurement International Conference 2019, 113850M (30 December 2019); https://doi.org/10.1117/12.2542914

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