Glassy free-form 3D micro-optics enabled via ultrafast laser 3D nanolithography

Simonas Varapnickas; Meguya Ryu; Darius Gailevicius; Tai Suzuki; Greta Merkininkaite; Simas Sakirzanovas; Junko Morikawa; Saulius Juodkazis; Mangirdas Malinauskas

doi:10.1117/12.2578469

5 March 2021 Glassy free-form 3D micro-optics enabled via ultrafast laser 3D nanolithography

Simonas Varapnickas, Meguya Ryu, Darius Gailevicius, Tai Suzuki, Greta Merkininkaite, Simas Sakirzanovas, Junko Morikawa, Saulius Juodkazis, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV; 1169610 (2021) https://doi.org/10.1117/12.2578469
Event: SPIE OPTO, 2021, Online Only

Abstract

Here we report on the laser manufacturing of glass true 3D micro-optics. We demonstrate the feasibility of producing individual free-form geometry elements such as lenses, prisms, gratings proving the potential of integration into monolith stacked components. This is achieved by combining ultrafast laser 3D nanolithography and subsequent thermal post-treatment (calcination) - a novel approach introduced for additive manufacturing of inorganic materials [Nanoscale Horiz. 4, 647 (2019)]). The laser made pristine micro-optical components maintain their predefined shape while material is converted from hybrid polymer to glass corresponding to its inherent refractive index and transparency. This approach enables both realization of complex geometries and variation of material properties simultaneously.

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Simonas Varapnickas, Meguya Ryu, Darius Gailevicius, Tai Suzuki, Greta Merkininkaite, Simas Sakirzanovas, Junko Morikawa, Saulius Juodkazis, and Mangirdas Malinauskas "Glassy free-form 3D micro-optics enabled via ultrafast laser 3D nanolithography", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 1169610 (5 March 2021); https://doi.org/10.1117/12.2578469

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