Smart slit assembly employing continuously tunable MEMS shutter

Anton Lagosh; Gergely Huszka; Hamed Sattari; Berit Ahlers; Benedikt Guldimann; Grégoire Kerr; Mauro Melozzi; Peyman Rahnama; Takeshi Nishizawa; Niels Quack

doi:10.1117/12.2583149

5 March 2021 Smart slit assembly employing continuously tunable MEMS shutter

Anton Lagosh, Gergely Huszka, Hamed Sattari, Berit Ahlers, Benedikt Guldimann, Grégoire Kerr, Mauro Melozzi, Peyman Rahnama, Takeshi Nishizawa, Niels Quack

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Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970P (2021) https://doi.org/10.1117/12.2583149
Event: SPIE OPTO, 2021, Online Only

Abstract

We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 μm × 111 μm smart slit channel employing a MEMS actuated shutter to continuously modulate the intensity of the optical input signal. The MEMS actuated shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow an absolute displacement of 52 μm at 74 V, resulting in a continuously tunable shutter efficiency of up to 99.97% at an operating wavelength of 532 nm.

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Anton Lagosh, Gergely Huszka, Hamed Sattari, Berit Ahlers, Benedikt Guldimann, Grégoire Kerr, Mauro Melozzi, Peyman Rahnama, Takeshi Nishizawa, and Niels Quack "Smart slit assembly employing continuously tunable MEMS shutter", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970P (5 March 2021); https://doi.org/10.1117/12.2583149

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