Dr. Takeshi Nishizawa
at OHB-System AG
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11697, 116970P (2021) https://doi.org/10.1117/12.2583149
KEYWORDS: Microelectromechanical systems, Camera shutters, Wafer-level optics, Silica, Modulation, Waveguides, Vapor etching, Spectrometers, Silicon, Semiconducting wafers

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