On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses

Yanfen Zhai; Takashi Sasaki; Mohssen Moridi; Ronghui Lin; Zahrah Alnakhli; Atif Shamim; Xiaohang Li; Mohammad Younis; Kazuhiro Hane; Lixiang Wu

doi:10.1117/12.2649216

9 March 2023 On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses

Yanfen Zhai, Takashi Sasaki, Mohssen Moridi, Ronghui Lin, Zahrah Alnakhli, Atif Shamim, Xiaohang Li, Mohammad Younis, Kazuhiro Hane, Lixiang Wu

Author Affiliations +

Proceedings Volume 12379, Photons Plus Ultrasound: Imaging and Sensing 2023; 123791P (2023) https://doi.org/10.1117/12.2649216
Event: SPIE BiOS, 2023, San Francisco, California, United States

Conference Poster

Abstract

An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.

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Yanfen Zhai, Takashi Sasaki, Mohssen Moridi, Ronghui Lin, Zahrah Alnakhli, Atif Shamim, Xiaohang Li, Mohammad Younis, Kazuhiro Hane, and Lixiang Wu "On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses", Proc. SPIE 12379, Photons Plus Ultrasound: Imaging and Sensing 2023, 123791P (9 March 2023); https://doi.org/10.1117/12.2649216

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