An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.
Harnessing the omnipresent radio frequency (RF) waves intend to explore the new diode technologies as they determine the frequency of operation and ultimately the power conversion efficiency. Recently, a considerable effort focused on performance, reliable and low-cost fabrication methods. Here, we report the fabrication of sub-20 nm co-planar, asymmetric and self-forming nanogap electrodes by adhesion lithography (a-Lith) as an alternative, low-cost and large-area patterning technique. Moreover, solution processing and rapid Flash Lamp Annealing (FLA) route employed to fabricate Schottky diodes. These diodes are having more than 104 On/Off ratio, low series resistance and junction capacitance due to the novel co-planar architecture and thus operating beyond 10 GHz. This paves the way to a radically new diode technology that has a huge impact on the IoT – Wireless Energy Harvesting (WEH) and RFID system.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.