Measurement of angular displacement by precisely controlled transmission structure based on laser interferometric system

Jin Zhou; An Lu; Chong Yue; Sen Zhou; Lei Tao

doi:10.1117/12.2666786

4 April 2023 Measurement of angular displacement by precisely controlled transmission structure based on laser interferometric system

Jin Zhou, An Lu, Chong Yue, Sen Zhou, Lei Tao

Author Affiliations +

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 1261774 (2023) https://doi.org/10.1117/12.2666786
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

Laser interferometry is a typical representative of the highest level in the field of geometric metrology, and its accuracy can reach sub-nanometer while taking the light wavelength as a measuring scale. In this paper, we present a precisely controlled transmission structure to realize the conversion between angular and linear displacement, therefore the angular displacement can be obtained based on the high-precision linear displacement measured by the laser interferometric system. By comparing the measured angular values with the reference values, the maximum error of angular displacement measurement in this system is ± 5 arcsec, which is from the calibration certification of the National Institute of Metrology. The reference values are obtained by measuring the angular polygon with a photoelectric autocollimator, and an angular displacement measurement error of ±1 arcsec is achieved based on laser interferometric system in this paper after correcting with a series of conversion coefficients between linear and angular displacement.

Citation Download Citation

Jin Zhou, An Lu, Chong Yue, Sen Zhou, and Lei Tao "Measurement of angular displacement by precisely controlled transmission structure based on laser interferometric system", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 1261774 (4 April 2023); https://doi.org/10.1117/12.2666786

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