Miniature interferometry systems

Xiangyu Zhao; Jinlong Zhu

doi:10.1117/12.3018559

30 April 2024 Miniature interferometry systems

Xiangyu Zhao, Jinlong Zhu

Proceedings Volume 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems; 131550Y (2024) https://doi.org/10.1117/12.3018559
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

This thesis presents a miniature interferometric system designed to realize high-precision non-contact measurements of micro- and nanostructures on samples to be tested. Traditional interferometric systems mainly use vertical scanning interferometry, which is usually limited to the measurement of small samples in laboratory scenarios. In order to meet diversified measurement needs, we have developed a compact, small and portable micro interferometry system, which consists of modules such as a light source and illumination system, an imaging system, a PZT displacement system, and a micro-reflector stylus. With this system, the vertical measurement space can be reduced to less than 1mm. We also employ algorithms such as multi-step phase shift and envelope curve fitting to achieve high precision measurements with an error of less than 1%.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xiangyu Zhao and Jinlong Zhu "Miniature interferometry systems", Proc. SPIE 13155, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems, 131550Y (30 April 2024); https://doi.org/10.1117/12.3018559

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