This thesis presents a miniature interferometric system designed to realize high-precision non-contact measurements of micro- and nanostructures on samples to be tested. Traditional interferometric systems mainly use vertical scanning interferometry, which is usually limited to the measurement of small samples in laboratory scenarios. In order to meet diversified measurement needs, we have developed a compact, small and portable micro interferometry system, which consists of modules such as a light source and illumination system, an imaging system, a PZT displacement system, and a micro-reflector stylus. With this system, the vertical measurement space can be reduced to less than 1mm. We also employ algorithms such as multi-step phase shift and envelope curve fitting to achieve high precision measurements with an error of less than 1%.
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