Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application

Wen-Jie Qi; Wei-Feng Yu; Bing-Zong Li; Jing Liu; Fang Lu; Ming Zhang; Guo-Sheng Dong

doi:10.1117/12.190804

26 October 1994 Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application

Wen-Jie Qi, Wei-Feng Yu, Bing-Zong Li, Jing Liu, Fang Lu, Ming Zhang, Guo-Sheng Dong

Author Affiliations +

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190804
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

The nitrogen-rich silicon oxynitride thin film for gate insulator application has been studied in this work. The Plasma Enhanced Chemical Vapour Deposition (PECVD) process was carried out at 350 degree(s)C with a low power density (0.011 W/cm²). The Auger Electron Spectroscopy (AES) depth profiling and infrared absorption spectra show the film is composed of nitrogen-rich silicon oxynitride. MOS C-V measurements demonstrated that a pre-deposition plasma nitridation may result in a higher dielectric breakdown. The post- deposition densification can be used to remove the plasma induced damages, and the post-metallization annealing is effective in reducing the irradiation damage and obtaining a low interface state density.

Citation Download Citation

Wen-Jie Qi, Wei-Feng Yu, Bing-Zong Li, Jing Liu, Fang Lu, Ming Zhang, and Guo-Sheng Dong "Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190804

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available