Optical investigations of Cr and CrN layers obtained by magnetron sputtering in ion-beam-assisted deposition process (IBAD)

Waldemar Oleszkiewicz; Ewa Oleszkiewicz; Krystyna Zukowska

doi:10.1117/12.353095

14 July 1999 Optical investigations of Cr and CrN layers obtained by magnetron sputtering in ion-beam-assisted deposition process (IBAD)

Waldemar Oleszkiewicz, Ewa Oleszkiewicz, Krystyna Zukowska

Author Affiliations +

Proceedings Volume 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (1999) https://doi.org/10.1117/12.353095
Event: Eleventh Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1998, Stara Lesna, Slovakia

Abstract

In the ion beam deposition process the source of material was Cr target subjected to magnetron sputtering. Cr and CrN layers deposition processes were carried out in the presence of Ar and Ar + N₂ ions atmosphere. The optical investigations of Cr and CrN layers obtained by IBAD processes were made to estimate the efficiency of such modifying factor as ion beam bombardment. The optical constants n and k were determined by ellipsometry for Cr and CrN layers deposited onto grounded or negatively biased (bias voltages from 0 to 500 V) BK7 glass substrates.

Citation Download Citation

Waldemar Oleszkiewicz, Ewa Oleszkiewicz, and Krystyna Zukowska "Optical investigations of Cr and CrN layers obtained by magnetron sputtering in ion-beam-assisted deposition process (IBAD)", Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); https://doi.org/10.1117/12.353095

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available