Design and experiment of silicon PCR chips

Zheng Cui; Zhan Zhao; Shanhong Xia

doi:10.1117/12.462884

19 April 2002 Design and experiment of silicon PCR chips

Zheng Cui, Zhan Zhao, Shanhong Xia

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462884
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

There are considerable interests in integrating Polymerase chain reaction (PCR) on a microchip can have much fast heating and cooling rate, the delicacy in its structure makes the PCR experiment difficult and cracks often occur particularly for the thin membrane type of PCR chips. Design study and experiment of silicon PCR chips are presented with the aim of identifying the problems encountered in experiment and finding an optimum chip structure. Heating characteristics of four different heater designs have been compared, so have the PCR chambers with fixed frame and with suspended frame. The thermal stress analysis has shown that the structure and heater design can make a significant difference in heating characteristics and in reducing the failure of PCR chips. Different solutions to reduce PCR chip failure have been proposed. One of the solutions was implemented in the experiment, confirming the design study results. Silicon PCR chips have been fabricated. Thermal cycling and initial DNA amplification results are presented.

Citation Download Citation

Zheng Cui, Zhan Zhao, and Shanhong Xia "Design and experiment of silicon PCR chips", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462884

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