Pulsed Laser Processing Of Silicon Via Absorption By Free Carriers

R. B. James

doi:10.1117/12.961201

26 June 1986 Pulsed Laser Processing Of Silicon Via Absorption By Free Carriers

R. B. James

Proceedings Volume 0623, Advanced Processing and Characterization of Semiconductors III; (1986) https://doi.org/10.1117/12.961201
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Using transmission electron microscopy, we show that melting and subsequent defect-free recrystallization can be obtained in silicon by absorbing the pulse energy via free-carrier transitions. We use a pulsed CO₂ laser to anneal extended lattice defects caused by high-temperature diffusion of phosphorus into lightly doped silicon. For pulse energy densities exceeding a threshold value, we find that the spherical precipitates and dislocation loops in the diffused layer are dissolved by C0₂ laser-induced melting, which results in a large increase in the electrically active phosphorus in the near-surface region. We also used the differential absorption between layers with different free-carrier concentrations to achieve melting of a buried ion-implanted layer, without melting the material that encapsulates the molten layer. This type of melting phenomenon is likely not obtainable using a laser where the absorption is dominated by an intrinsic mechanism. New applications using free-carrier absorption as a means to process silicon samples are discussed.

Citation Download Citation

R. B. James "Pulsed Laser Processing Of Silicon Via Absorption By Free Carriers", Proc. SPIE 0623, Advanced Processing and Characterization of Semiconductors III, (26 June 1986); https://doi.org/10.1117/12.961201

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available