Residual-free imprint for sensor definition

A. Mayer; N. Bogdanski; S. Möllenbeck; H.-C. Scheer

doi:10.1117/12.835182

27 May 2009 Residual-free imprint for sensor definition

A. Mayer, N. Bogdanski, S. Möllenbeck, H.-C. Scheer

Proceedings Volume 7470, 25th European Mask and Lithography Conference; 74700K (2009) https://doi.org/10.1117/12.835182
Event: 25th European Mask and Lithography Conference, 2009, Dresden, Germany

Abstract

For the preparation of interdigitated sensor devices with nanometre sized electrodes a low-cost route is followed. The central technique used for electrode definition is nanoimprint. To imprint the larger contact areas as easy as the electrodes, the contacts are broken down into a grid. In order to end up with a highly uniform residual layer the concept of 'partial cavity filling' is utilised, resulting in an almost negligible layer thickness. The metallic electrodes are defined by sputtering and lift-off directly after imprint, where a previous etching of the residual layer is not required. The results show that the concept works. With this strategy, preparation of an interdigitated sensor requires nothing but spin-coating, nanoimprinting and sputtering/lift-off.

Citation Download Citation

A. Mayer, N. Bogdanski, S. Möllenbeck, and H.-C. Scheer "Residual-free imprint for sensor definition", Proc. SPIE 7470, 25th European Mask and Lithography Conference, 74700K (27 May 2009); https://doi.org/10.1117/12.835182

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available