Neon reduction program on Cymer ArF light sources

Dinesh Kanawade; Yzzer Roman; Ted Cacouris; Josh Thornes; Kevin O'Brien

doi:10.1117/12.2219942

15 March 2016 Neon reduction program on Cymer ArF light sources

Dinesh Kanawade, Yzzer Roman, Ted Cacouris, Josh Thornes, Kevin O'Brien

Proceedings Volume 9780, Optical Microlithography XXIX; 97801H (2016) https://doi.org/10.1117/12.2219942
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

In response to significant neon supply constraints, Cymer has responded with a multi-part plan to support its customers. Cymer’s primary objective is to ensure that reliable system performance is maintained while minimizing gas consumption. Gas algorithms were optimized to ensure stable performance across all operating conditions.

The Cymer neon support plan contains four elements: 1. Gas reduction program to reduce neon by >50% while maintaining existing performance levels and availability; 2. short-term containment solutions for immediate relief. 3. qualification of additional gas suppliers; and 4. long-term recycling/reclaim opportunity. The Cymer neon reduction program has shown excellent results as demonstrated through the comparison on standard gas use versus the new >50% reduced neon performance for ArF immersion light sources. Testing included stressful conditions such as repetition rate, duty cycle and energy target changes. No performance degradation has been observed over typical gas lives.

Citation Download Citation

Dinesh Kanawade, Yzzer Roman, Ted Cacouris, Josh Thornes, and Kevin O'Brien "Neon reduction program on Cymer ArF light sources", Proc. SPIE 9780, Optical Microlithography XXIX, 97801H (15 March 2016); https://doi.org/10.1117/12.2219942

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