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Akira Mizutani
at Gigaphoton Inc
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Publications (1)
Proceedings Article | 25 March 2019 Presentation + Paper
Microprocessing of organic material for semiconductor packaging by 248 nm excimer laser
Akira Suwa, Junichi Fujimoto, Yasufumi Kawasuji, Masakazu Kobayashi, Masashi Shimbori, Takashi Onose, Masaki Arakawa, Akira Mizutani, Hakaru Mizoguchi
Proceedings Volume 10906, 1090609 (2019) https://doi.org/10.1117/12.2510951
KEYWORDS: Excimer lasers, Organic materials, Scanning electron microscopy, Semiconductors, Packaging, Deep ultraviolet, Organic semiconductors, Semiconductor materials, Materials processing, Laser processing
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